Nanoelectronics and Semiconductor Devices Group
Laboratory Facilities
A wide range of advanced device simulation, fabrication, and characterization tools are available in our Silicon Photonics and Microelectronics Laboratory, VLSI Laboratory, Centre for Nanotechnology, Center for Organic Electronics, and the Central Instruments Facility at IITG. Some of these that our group members use are listed here:
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1. Deep Level Transient Spectroscopy
2. Mask Aligner
3. Multi-Source E-beam Evaporator
4. LED Solar Simulator
5. Wet Benches, Fume Hoods, UV-Ozone Cleaner, and Spin Coaters
6. Large Area Doctor Blade System
7. Cryogenic Chamber with Probes
8. DC and RF Probe Stations
9. Wire Bonder
10. Integrated and Standalone Glove Boxes
11. FESEM, HRTEM, and AFM
12. Profilometer
13. E-Beam Lithography
14. Organic Evaporator
15. Thermal Evaporator
16. RF Sputtering System
17. PL, TRPL, Confocal, and Raman Spectroscopy
18. Cryogenic Probe Station
19. Oxidation and Diffusion Furnace
20. Plasma Enhanced CVD System
21. Reactive Ion Etching System
22. Contact Angle Goniometer
24. Impedance Spectroscopy System
25. I-V and C-V Measurement Systems
26. Double-Sided Mask Writer
27. Laser Micro Machining System
28. Device Simulation Software including Synopsys 2D TCAD, Silvaco 3D TCAD, and Lumerical.
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